8Inch Wafer Transport Cassette Box 200mm Corrosion-Resistant High-Temperature Rated
8-Inch Wafer Cassette Box is a precision container designed for the safe storage, transportation, and handling of 8-inch (200mm) semiconductor wafers. It is typically constructed from high-purity polymers (like PP or PFA) or metals, and features slots to securely hold wafers vertically. Its core function is to protect delicate wafers from particulate contamination, mechanical damage, electrostatic discharge (ESD), and chemical exposure during fabrication processes like etching, cleaning, and inspection, while ensuring compatibility with automated handling systems (AMHS) in cleanrooms.
8 Inch Wafer Cassette Boxs Key Advantages & Features
| Feature Category | Core Advantage |
| Contamination Control | Ultra-low particle generation and chemical resistance (acids/alkalis) prevent wafer surface degradation. |
| ESD Protection | Surface resistivity control (e.g., 10⁶–10⁹ Ω/sq) prevents electrostatic damage to circuits. |
| Mechanical Safety | Rigid structure with shock-absorbing design minimizes wafer breakage during transport and handling. |
| Automation Ready | SEMI E15-standard dimensions and RFID/barcode tags enable seamless integration with AMHS and robotics. |
| Thermal & Chemical Stability | Withstands high temperatures (e.g., PFA: -200°C to +260°C) and resists strong acids/alkalis (e.g., HF, HCl). |
8 Inch Wafer Cassette Boxs Applications
8-inch wafer cassette boxes are critically used in:
- Semiconductor Wafer Fabs: For storage and transport between processes like etching, cleaning, CVD, and metrology.
- Solar/PV Manufacturing: As carrier trays for silicon solar cells during cleaning and etching steps.
- Compound Semiconductor & Power Device Fabrication: For handling gallium arsenide (GaAs), gallium nitride (GaN), and silicon carbide (SiC) wafers during epitaxy, ion implantation, and annealing processes, leveraging their chemical resistance to harsh precursors and high-temperature stability.
- MEMS & Sensor Production: In the manufacturing of micro-electromechanical systems (MEMS) and sensors, where they protect delicate structures during wet etching, sacrificial layer removal, and critical point drying (CPD) steps.
- Advanced Packaging & Interposer Processing: For 2.5D/3D integration and interposer handling, ensuring wafer integrity during temporary bonding, through-silicon via (TSV) formation, and redistribution layer (RDL) processing.
8 Inch Wafer Cassette Boxs Key Datas
| Parameter Category | Typical Value/Specification |
| Material Composition | PFA, PP, or PC options available |
| ESD Protection | 10⁶–10⁹ Ω/sq |
| Chemical Resistance | Resists HF, HCl, etc. |
| Thermal Stability | -200°C to +260°C |
| Dimensional Standard | 8-inch (200mm) |
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8 Inch Wafer Cassette Boxs FAQ
1.Q: What is the diameter of an 8 inch wafer?
A: The diameter of an 8-inch wafer is 200mm.
2.Q: What is a wafer cassette?
A: A wafer cassette is a container with slots designed to safely store, transport, and handle semiconductor wafers in cleanroom environments.
3.Q: What is the primary function of an 8-inch wafer cassette box in semiconductor manufacturing?
A: It is designed to safely store, transport, and handle 8-inch (200mm) wafers during processes like wafer dicing, cleaning, and etching, providing protection against contamination, mechanical shock, and electrostatic discharge (ESD) while ensuring compatibility with automated handling systems.
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